Cleanroom Requirements For Class 10,000 Electronic Cleanrooms
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Class 10000 Clean Room is a type of environmental purification that mainly relies on continuously diluting indoor air with clean air, gradually discharging indoor pollutants, and achieving purification effects.
Class 10000 Clean Room standard (defined by the number of dust particles and microorganisms): The maximum allowable number of dust particles (per cubic meter) is no more than 350,000 particles greater than or equal to 0.5 microns and no more than 2,000 particles greater than or equal to 5 microns. The maximum allowable number of floating bacteria per cubic meter is no more than 100, and the number of settling bacteria per petri dish is no more than 3.
The testing standards for Class 10000 Clean Room mainly include:
1, Airflow velocity and uniformity testing is a prerequisite for other tests of cleanroom effectiveness. The purpose of this test is to reveal the average airflow and its uniformity in the working area of a unidirectional flow cleanroom.
2, The purpose of vibration detection is to determine the vibration amplitude of each monitor in the cleanroom.
3, By obtaining the self-cleaning time, it is possible to check whether the cleanroom can restore its original cleanliness when it is polluted.
4, The purpose of illuminance detection is to determine the level of illumination and uniformity in the cleanroom.
5, The purpose of temperature and humidity detection is to adjust the temperature and humidity within certain limits, including detection of the air supply temperature in the cleanroom, air temperature at representative measuring points, air temperature at the center of the cleanroom, air temperature at the sensing element, and relative humidity and return air temperature sensing.
6, Cleanliness detection is to determine the air cleanliness that a clean environment can achieve, which can be detected using a particle counter.
The cleanliness level requirements for a Class 10000 Clean Room in the electronics manufacturing industry are high, with air volume, temperature, humidity, pressure difference, and equipment exhaust controlled as needed. Illumination and cleanroom cross-sectional airflow velocity are controlled according to design or specifications. In addition, this type of cleanroom has extremely strict requirements for electrostatic discharge. The requirement for humidity is particularly important because an excessively dry environment is highly susceptible to static electricity, which can damage CMOS integrated circuits. Generally, the temperature in electronic manufacturing facilities should be controlled at around 22°C, and relative humidity should be controlled between 50-60% (with specific temperature and humidity regulations for special cleanrooms). This can effectively eliminate static electricity and make people feel comfortable. Chip production workshops, integrated circuit cleanrooms and disk manufacturing workshops are important components of cleanrooms in the electronics manufacturing industry. Due to the strict requirements of electronic products on indoor air environment and quality during the manufacturing and production process, controlling micro-particles and floating dust is the main target, and strict regulations have also been made for temperature and humidity, fresh air volume, noise, etc.
The ventilation requirements for a Class 10,000 cleanroom are: 15 air changes for a Class 100,000 cleanroom; 20 air changes for a Class 10,000 cleanroom; 30 air changes for a Class 1,000 cleanroom; and 500 air changes for a Class 100 cleanroom. The pressure difference between the main room and adjacent rooms should be 5Pa. The average air velocity for Class 10 and 100 cleanrooms should be 0.3-0.5 m/s. The temperature should be above 16°C in winter and below 26°C in summer, with a fluctuation of ±2°C. The humidity should be between 45-65%, with GMP powder workshops requiring around 50% humidity, while electronic workshops require slightly higher humidity to avoid static electricity. The noise level should be 65dB (A). The fresh air supply should be 10%-30% of the total air supply. The illumination should be 300LX.
The purification requirements for a Class 10,000 cleanroom mainly rely on clean air flow continuously diluting the indoor air and gradually discharging pollutants to achieve a clean effect. The indoor air flow is non-uniform and non-parallel, mixed with reflux or eddy currents. Different levels of cleanrooms rely mainly on different air supply volumes per unit time to achieve their objectives.
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